Compartment Shielding With Metal Frame and Cap

ABSTRACT

A semiconductor device has a substrate and a first semiconductor die disposed over the substrate. A first metal frame is disposed over the substrate around the first semiconductor die. A first metal lid is disposed over the first metal frame. A flap of the first metal lid includes an elastic characteristic to latch onto the first metal frame. An edge of the flap can have a castellated edge. A recess in the first metal frame and a protrusion on the first metal lid can be used to latch the first metal lid onto the first metal frame. A second metal frame and second metal lid can be disposed over an opposite surface of the substrate from the first metal frame.

CLAIM TO DOMESTIC PRIORITY

The present application is a continuation of U.S. patent applicationSer. No. 17/447,041, filed Sep. 7, 2021, which application isincorporated herein by reference.

FIELD OF THE INVENTION

The present invention relates in general to semiconductor devices and,more particularly, to a semiconductor device and method of forming ashielded semiconductor device using compartment shielding with a metalframe and cap.

BACKGROUND OF THE INVENTION

Semiconductor devices are commonly found in modern electronic products.Semiconductor devices perform a wide range of functions such as signalprocessing, high-speed calculations, transmitting and receivingelectromagnetic signals, controlling electronic devices, transformingsunlight to electricity, and creating visual images for televisiondisplays. Semiconductor devices are found in the fields ofcommunications, power conversion, networks, computers, entertainment,and consumer products. Semiconductor devices are also found in militaryapplications, aviation, automotive, industrial controllers, and officeequipment.

Semiconductor devices are often susceptible to electromagneticinterference (EMI), radio frequency interference (RFI), harmonicdistortion, or other inter-device interference, such as capacitive,inductive, or conductive coupling, also known as cross-talk, which caninterfere with their operation. High-speed analog circuits, e.g., radiofrequency (RF) filters, or digital circuits also generate interference.

Conductive layers are commonly formed over semiconductor packages toshield electronic parts within the package from EMI and otherinterference. The shielded components are encapsulated in an insulatingmolding compound, and then a conductive layer is sputtered onto themolding compound to form a shielding layer around the components.Shielding layers absorb EMI before the signals can hit semiconductor dieand discrete components within the package, which might otherwisemalfunction. Shielding layers are also formed over packages withcomponents that are expected to generate EMI to protect nearby devices.

One problem with prior art methods of semiconductor package shielding isthat forming the shielding layer over encapsulated components is acomplicated process involving several costly steps. Shielding componentsfrom intra-package interference is especially costly, requiringtrenching of the encapsulant and deposition of metal to fill the trench.The encapsulant also limits thermal release of the underlyingcomponents, which causes problems for thermal budgets of devices.Moreover, the shielding layers formed on molding compound havedurability issues and are susceptible to peeling off. Therefore, a needexists for an improved shielding mechanism for semiconductor packages.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1 a-1 c illustrate a semiconductor wafer with a plurality ofsemiconductor die separated by a saw street;

FIGS. 2 a-2 k illustrate formation of a shielded semiconductor packageusing a metal frame and lid;

FIG. 3 illustrates a double-sided embodiment; and

FIGS. 4 a and 4 b illustrate integrating the shielded packages into anelectronic device.

DETAILED DESCRIPTION OF THE DRAWINGS

The present invention is described in one or more embodiments in thefollowing description with reference to the figures, in which likenumerals represent the same or similar elements. While the invention isdescribed in terms of the best mode for achieving the invention'sobjectives, it will be appreciated by those skilled in the art that itis intended to cover alternatives, modifications, and equivalents as maybe included within the spirit and scope of the invention as defined bythe appended claims and their equivalents as supported by the followingdisclosure and drawings. The term “semiconductor die” as used hereinrefers to both the singular and plural form of the words, andaccordingly, can refer to both a single semiconductor device andmultiple semiconductor devices.

Semiconductor devices are generally manufactured using two complexmanufacturing processes: front-end manufacturing and back-endmanufacturing. Front-end manufacturing involves the formation of aplurality of die on the surface of a semiconductor wafer. Each die onthe wafer contains active and passive electrical components, which areelectrically connected to form functional electrical circuits. Activeelectrical components, such as transistors and diodes, have the abilityto control the flow of electrical current. Passive electricalcomponents, such as capacitors, inductors, and resistors, create arelationship between voltage and current necessary to perform electricalcircuit functions.

Back-end manufacturing refers to cutting or singulating the finishedwafer into the individual semiconductor die and packaging thesemiconductor die for structural support, electrical interconnect, andenvironmental isolation. To singulate the semiconductor die, the waferis scored and broken along non-functional regions of the wafer calledsaw streets or scribes. The wafer is singulated using a laser cuttingtool or saw blade. After singulation, the individual semiconductor dieare mounted to a package substrate that includes pins or contact padsfor interconnection with other system components. Contact pads formedover the semiconductor die are then connected to contact pads within thepackage. The electrical connections can be made with conductive layers,bumps, stud bumps, conductive paste, bond wires, or other suitableinterconnect structure. An encapsulant or other molding compound isdeposited over the package to provide physical support and electricalisolation. The finished package is then inserted into an electricalsystem and the functionality of the semiconductor device is madeavailable to the other system components.

FIG. 1 a shows a semiconductor wafer 100 with a base substrate material102, such as silicon, germanium, aluminum phosphide, aluminum arsenide,gallium arsenide, gallium nitride, indium phosphide, silicon carbide, orother bulk semiconductor material. A plurality of semiconductor die orcomponents 104 is formed on wafer 100 separated by a non-active,inter-die wafer area or saw street 106 as described above. Saw street106 provides cutting areas to singulate semiconductor wafer 100 intoindividual semiconductor die 104. In one embodiment, semiconductor wafer100 has a width or diameter of 100-450 millimeters (mm).

FIG. 1B shows a cross-sectional view of a portion of semiconductor wafer100. Each semiconductor die 104 has a back or non-active surface 108 andan active surface 110 containing analog or digital circuits implementedas active devices, passive devices, conductive layers, and dielectriclayers formed within or over the die and electrically interconnectedaccording to the electrical design and function of the die. For example,the circuit may include one or more transistors, diodes, and othercircuit elements formed within active surface 110 to implement analogcircuits or digital circuits, such as digital signal processor (DSP),ASIC, MEMS, memory, or other signal processing circuit. Semiconductordie 104 may also contain integrated passive devices (IPDs), such asinductors, capacitors, and resistors, for RF signal processing. Backsurface 108 of semiconductor wafer 100 may undergo an optionalbackgrinding operation with a mechanical grinding or etching process toremove a portion of base material 102 and reduce the thickness ofsemiconductor wafer 100 and semiconductor die 104.

An electrically conductive layer 112 is formed over active surface 110using PVD, CVD, electrolytic plating, electroless plating process, orother suitable metal deposition process. Conductive layers 112 includeone or more layers of aluminum (Al), copper (Cu), tin (Sn), nickel (Ni),gold (Au), silver (Ag), or other suitable electrically conductivematerial. Conductive layer 112 operates as contact pads electricallyconnected to the circuits on active surface 110.

Conductive layer 112 can be formed as contact pads disposed side-by-sidea first distance from the edge of semiconductor die 104, as shown inFIG. 1B. Alternatively, conductive layer 112 can be formed as contactpads that are offset in multiple rows such that a first row of contactpads is disposed a first distance from the edge of the die, and a secondrow of contact pads alternating with the first row disposed a seconddistance from the edge of the die. Conductive layer 112 represents thelast conductive layer formed over semiconductor die 104 with contactpads for subsequent electrical interconnect to a larger system. However,there may be one or more intermediate conductive and insulating layersformed between the actual semiconductor devices on active surface 110and contact pads 112 for signal routing.

An electrically conductive bump material is deposited over conductivelayer 112 using an evaporation, electrolytic plating, electrolessplating, ball drop, or screen printing process. The bump material can beAl, Sn, Ni, Au, Ag, Pb, Bi, Cu, solder, and combinations thereof, withan optional flux solution. For example, the bump material can beeutectic Sn/Pb, high-lead solder, or lead-free solder. The bump materialis bonded to conductive layer 112 using a suitable attachment or bondingprocess. In one embodiment, the bump material is reflowed by heating thematerial above its melting point to form conductive balls or bumps 114.In one embodiment, conductive bumps 114 are formed over an under bumpmetallization (UBM) having a wetting layer, barrier layer, and adhesionlayer. Conductive bumps 114 can also be compression bonded orthermocompression bonded to conductive layer 112. Conductive bumps 114represent one type of interconnect structure that can be formed overconductive layer 112 for electrical connection to a substrate. Theinterconnect structure can also use bond wires, conductive paste, studbump, micro bump, or other electrical interconnect.

In FIG. 1 c , semiconductor wafer 100 is singulated through saw street106 using a saw blade or laser cutting tool 118 into individualsemiconductor die 104. The individual semiconductor die 104 can beinspected and electrically tested for identification of KGDpost-singulation.

FIGS. 2 a-2 k illustrate forming shielded semiconductor packages 150with semiconductor die 104. FIG. 2 a is a partial cross-sectional viewof a substrate 152 used as a base for manufacturing the packages.Substrate 152 can be a unit substrate singulated from a larger panel orremain as part of a larger substrate panel. Hundreds or thousands ofpackages are commonly formed in a single panel using the same stepsdescribed herein.

Substrate 152 includes one or more insulating layers 154 interleavedwith one or more conductive layers 156. Insulating layer 154 is a coreinsulating board in one embodiment, with conductive layers 156 patternedover the top and bottom surfaces, e.g., a copper-clad laminatesubstrate. Conductive layers 156 also include conductive viaselectrically coupled through insulating layers 154. Substrate 152 caninclude any number of conductive and insulating layers interleaved overeach other. A solder mask or passivation layer can be formed over eitherside of substrate 152. Any suitable type of substrate or leadframe isused for substrate 152 in other embodiments.

Any components desired to implement the intended functionality ofpackages 150 are mounted to or disposed over substrate 152 andelectrically connected to conductive layers 156. Substrate 152 has twomajor surfaces: top surface 157 and bottom surface 159. Components canbe mounted onto top surface 157 and bottom surface 159 in any suitableconfiguration.

In FIG. 2 b , manufacturing of package 150 on substrate 152 commenceswith surface mounting of semiconductor die 104 a and discrete component164 on bottom surface 159. Bottom components are mounted first, butmanufacturing could also proceed with components disposed on top surface157 first. Discrete components 164, e.g., resistors, capacitors,inductors, transistors, or diodes, are mounted on bottom surface 159using solder paste or another suitable attachment and connectionmechanism. Solder paste is reflowed between terminals of discretecomponents 164 and contact pads of conductive layers 156 on bottomsurface 159.

In FIG. 2 c , substrate 152 is flipped and semiconductor die 104 b,semiconductor die 104 c, and additional discrete components 164 aremounted on top surface 157. Semiconductor die 104 a-104 c can all beidentical semiconductor die from the same wafer 100. In otherembodiments, semiconductor die 104 a is a digital processor chip andsemiconductor die 104 b and 104 c are flash memory or RAM chips that areconnected to semiconductor die 104 a for use by the processor. Anysuitable combination of active, passive, and integrated components canbe mounted on top surface 157 and bottom surface 159 in any suitableconfiguration.

FIGS. 2 d and 2 e show a metal frame 200 that will be mounted to topsurface 157 of substrate 152 to facilitate shielding. FIG. 2 d is a viewfrom below frame 200, while FIG. 2 e is a view from above. Frame 200 isformed from a piece of sheet metal in one embodiment. The metal can bealuminum, steel, copper, titanium, gold, silver, alloys thereof, or anyother suitable metal material. Non-metallic materials can be used inother embodiments. The sheet metal is cut to the proper shape and thenfolded into the structure seen in FIGS. 2 d and 2 e . The remaining flatsheet metal pieces after cutting and folding operate as a roof 202 forthe frame.

Cutting is used to form a plurality of openings 204 and flaps 206 inframe 200 prior to folding. Divots 208 are optionally formed into thesheet metal at the edges of flaps 206 to improve reliability of foldingthe flaps while the remainder of sheet metal remains flat. Divots 208are semicircular shaped in the illustrated embodiment but could also beany suitable polygon. Notches 210 are formed at the edge of each flap206. Notches 210 result in flaps 206 having castellated edges. Flaps 206are castellated. Notches 210 that are formed around the perimeter offrame 200 have holes 212 formed therethrough, which will be used to holda lid onto frame 200.

The cutting of sheet metal into frame 200 can be performed using a lasercutter, die punch, or other suitable method. Flaps 206 are all folded ata 90-degree angle toward the bottom of frame 200 after cutting using anysuitable manufacturing process. Alternatively, frame 200 can be molded,machined, or otherwise formed into the desired shape.

FIG. 2 f shows a cross-section of frame 200 disposed or mounted onto orover top surface 157 of substrate 152 using, e.g., a pick and placeoperation. Flaps 206 are oriented downward around and between themounted components so that the ends of the flaps contact substrate 152.Roof 202 is oriented away from substrate 152. Roof 202 reinforces thestrength of frame 200 and makes handling during manufacture withoutdamaging the frame more reliable.

Flaps 206 are formed around the full perimeter of frame 200 to surroundall components to be shielded. In addition, flaps 206 are optionallyformed within frame 200 to separate the shielded area into multipleseparately shielded compartments. Flaps 206 internal to frame 200, i.e.,not on the perimeter, provide shielding between components on topsurface 157, e.g., between die 104 b and die 104 c, so that thedifferent components do not cause interference in each other.

The areas of flaps 206 without notches 210 can be attached to conductivelayer 156 of substrate 152 using solder 220 as shown in the partialcross-section of FIG. 2 g . The soldering can be performed using anysuitable surface mount or other soldering technique. In one embodiment,solder 220 is disposed on contact pads of conductive layer 156 as solderpaste prior to disposing frame 200 onto the substrate and then reflowedto physically and electrically couple the frame to substrate 152. Flaps206 can be soldered continuously everywhere that the flaps meetsubstrate 200 or only a few select points can be soldered, e.g., justone point of solder 220 for each of the four corners.

FIG. 2 h shows another partial cross-section through a notch 210.Notches 210 provide gaps between frame 200 and substrate 152 so thatde-ionized water used during flux cleaning flows out of the frame asindicated by arrow 224 rather than being trapped between substrate 152,flaps 206, and roof 202. Any fluid used to clean or otherwise processpackages 150 is able to escape frame 200 via notches 210. Conductivelayer 156 may extend under notches 210 or may include breaks asillustrated.

FIG. 2 i shows a lid 230 that will be installed on frame 200 to completethe shielding functionality. Lid 230 is formed from sheet metalsimilarly to frame 200. No holes are formed through top 232 as was donewith holes 204 of frame 200 so that the sheet metal of the lid willcreate a complete cover over the components on substrate 152.Alternatively, openings could be formed resulting in select underlyingcomponents not being shielded by lid 230.

Flaps 236 are formed around the perimeter of lid 230 by cutting thesheet metal into the desired shape as with frame 200. Flaps 236 arefolded at a 90-degree angle to form sidewalls for lid 230. Indentations242 are formed in the flaps 236 at locations that correspond in positionto openings 212 of frame 200. Flaps 236 are folded so that indentations242 extend inward toward the interior of the lid.

An inner width between flaps 236 of lid 230 is approximately equal to orslightly larger than an outer width between the perimeter flaps 206 offrame 200. When lid 230 is disposed on frame 200 as shown in FIG. 2 j ,flaps 236 slide around flaps 206. Indentations 242 press against theoutsides of flaps 206, expanding flaps 236 of lid 230. Once lid 230 isfully pressed down as shown in FIG. 2 k , flaps 236 spring inward withindentations 242 of the lid pressing partially into openings 212 offrame 200. Lid 230 is secured by the elastic characteristic of the lidkeeping indentations 242 pressed into openings 212. While an indentation242 is shown which is pressed into the outside of lid 230 creating abump toward the inside, a protrusion could also be created orientedinward while leaving the outer surfaces of flaps 236 flat. Moreover,openings 212 could simply be an indentation instead of a hole formedcompletely through flaps 206. Openings 212 and indentations 242 operateas a latch to secure lid 230.

Bumps 248 are added in FIG. 2 k for mounting package 140 onto a largersubstrate of a device being manufactured. Bumps 248 are formed similarlyto bumps 114 of die 104. Substrate 152 is singulated if necessary.Package 150 in FIG. 2 k is a completed semiconductor package. Thecombination metal shield frame 200 and can lid 230 creates a completecompartmentalized EMI shield for package 150. The combination of frame200 and lid 230 extends over and around all components on top surface157 of substrate 152 to provide thorough shielding. Flaps 206 alsoextend down between different components to compartmentalize theshielding and thereby reduce intra-package interference.

Utilizing frame 200 and lid 230 eliminates the encapsulant that iscommonly used for shielded components and reduces complexity of creatingcompartment shielding within the encapsulant. Frame 200 and lid 230 arealso more reliable than the prior art methods due to the lid not beingsusceptible to peeling from encapsulant.

FIG. 3 shows another embodiment where a second shield is formed over thecomponents on bottom surface 159. The bottom shield includes a framewith flaps 260 and roof 262 just as with frame 200 on top surface 157.Additional flaps 260 are formed within the middle of the frame ifdesired to create compartmentalized shielding. Flaps 260 include all thesame features from flaps 206, e.g., castellated edges and openings tointerface with bumps or indentations on lid 270. Lid 270 including flaps272 is disposed over the bottom frame to complete the bottom shield.Flaps 272 include bumps or indentations that extend into an opening ordent in flaps 260. Bottom shield 260-272 can be disposed on bottomsurface 159 immediately after the other bottom components are mounted inFIG. 2 b , or at any other manufacturing stage.

FIGS. 4 a and 4 b illustrate incorporating the above-describedsemiconductor packages, e.g., package 150, into an electronic device300. FIG. 4 a illustrates a partial cross-section of package 150 mountedonto a printed circuit board (PCB) or other substrate 302 as part ofelectronic device 300. Bumps 248 are reflowed onto conductive layer 304of PCB 302 to physically attach and electrically connect package 150 tothe PCB. In other embodiments, thermocompression or other suitableattachment and connection methods are used. In some embodiments, anadhesive or underfill layer is used between package 150 and PCB 302.Semiconductor die 104 are electrically coupled to conductive layer 304through substrate 152 and bumps 248.

FIG. 4 b illustrates electronic device 300 including PCB 302 with aplurality of semiconductor packages mounted on a surface of the PCB,including package 150. Electronic device 300 can have one type ofsemiconductor package, or multiple types of semiconductor packages,depending on the application. Electronic device 300 can be a stand-alonesystem that uses the semiconductor packages to perform one or moreelectrical functions. Alternatively, electronic device 300 can be asubcomponent of a larger system. For example, electronic device 300 canbe part of a tablet computer, cellular phone, digital camera,communication system, or other electronic device. Electronic device 300can also be a graphics card, network interface card, or another signalprocessing card that is inserted into a computer. The semiconductorpackages can include microprocessors, memories, ASICs, logic circuits,analog circuits, RF circuits, discrete active or passive devices, orother semiconductor die or electrical components.

In FIG. 4 b , PCB 302 provides a general substrate for structuralsupport and electrical interconnection of the semiconductor packagesmounted on the PCB. Conductive signal traces 304 are formed over asurface or within layers of PCB 302 using evaporation, electrolyticplating, electroless plating, screen printing, or other suitable metaldeposition process. Signal traces 304 provide for electricalcommunication between the semiconductor packages, mounted components,and other external systems or components. Traces 304 also provide powerand ground connections to the semiconductor packages as needed.

In some embodiments, a semiconductor device has two packaging levels.First level packaging is a technique for mechanically and electricallyattaching the semiconductor die to an intermediate substrate. Secondlevel packaging involves mechanically and electrically attaching theintermediate substrate to PCB 302. In other embodiments, a semiconductordevice may only have the first level packaging where the die ismechanically and electrically mounted directly to PCB 302.

For the purpose of illustration, several types of first level packaging,including bond wire package 346 and flipchip 348, are shown on PCB 302.Additionally, several types of second level packaging, including ballgrid array (BGA) 350, bump chip carrier (BCC) 352, land grid array (LGA)356, multi-chip module (MCM) 358, quad flat non-leaded package (QFN)360, quad flat package 362, and embedded wafer level ball grid array(eWLB) 364 are shown mounted on PCB 302 along with package 150.Conductive traces 304 electrically couple the various packages andcomponents disposed on PCB 302 to package 150, giving use of thecomponents within package 150 to other components on the PCB.

Depending upon the system requirements, any combination of semiconductorpackages, configured with any combination of first and second levelpackaging styles, as well as other electronic components, can beconnected to PCB 302. In some embodiments, electronic device 300includes a single attached semiconductor package, while otherembodiments call for multiple interconnected packages. By combining oneor more semiconductor packages over a single substrate, manufacturerscan incorporate pre-made components into electronic devices and systems.Because the semiconductor packages include sophisticated functionality,electronic devices can be manufactured using less expensive componentsand a streamlined manufacturing process. The resulting devices are lesslikely to fail and less expensive to manufacture resulting in a lowercost for consumers.

While one or more embodiments of the present invention have beenillustrated in detail, the skilled artisan will appreciate thatmodifications and adaptations to those embodiments may be made withoutdeparting from the scope of the present invention as set forth in thefollowing claims.

What is claimed:
 1. A method of making a semiconductor device,comprising: providing a substrate; disposing a first semiconductor dieover the substrate; forming a first metal frame by, forming an openingthrough a sheet of metal, and folding an edge of the opening as a firstflap; disposing the first metal frame over the substrate around thefirst semiconductor die; and disposing a first metal lid over the firstmetal frame, wherein a flap of the first metal lid includes an elasticcharacteristic to latch onto the first metal frame.
 2. The method ofclaim 1, wherein the edge of the opening is castellated.
 3. The methodof claim 1, further including: forming a recess in the first metalframe; and forming a protrusion on the first metal lid, wherein theprotrusion aligns to the recess when the first metal lid is latched ontothe first metal frame.
 4. The method of claim 1, further includingforming a plurality of second flaps as part of the first metal frame,wherein each of the plurality of second flaps is folded to createsidewalls extending around a perimeter of the first metal frame.
 5. Themethod of claim 1, wherein the edge of the opening is oriented toward acenter of the first metal frame.
 6. The method of claim 1, furtherincluding disposing a second semiconductor die over the substrate,wherein the first flap is disposed between the first semiconductor dieand second semiconductor die.
 7. The method of claim 1, furtherincluding: disposing a second metal frame over an opposite surface ofthe substrate from the first metal frame; and disposing a second metallid over the second metal frame.
 8. A method of making a semiconductordevice, comprising: providing a substrate; disposing a semiconductor dieover the substrate; disposing a frame over the substrate around thesemiconductor die, wherein the frame includes an opening and a flapformed at an edge of the opening; and disposing a lid over the frame. 9.The method of claim 8, further including forming a notch in a sidewallof the frame.
 10. The method of claim 8, wherein a portion of the frameremains between the opening and the sidewall as a roof.
 11. The methodof claim 8, further including: forming an indentation in the lid; andpressing the lid onto the frame until the indentation aligns to a secondopening of the frame.
 12. The method of claim 8, wherein the frameincludes a plurality of compartments.
 13. The method of claim 8, furtherincluding attaching the frame to the substrate using solder.
 14. Asemiconductor device, comprising: a substrate; a first semiconductor diedisposed over the substrate; a metal frame disposed over the substratearound the first semiconductor die, wherein the metal frame includes anopening and a flap formed at an edge of the opening; and a metal liddisposed over the metal frame, wherein a sidewall of the metal lidincludes an elastic characteristic to latch onto the metal frame. 15.The semiconductor device of claim 14, wherein the flap includes acastellated edge.
 16. The semiconductor device of claim 14, furtherincluding: a recess formed in the metal frame; and a protrusion formedon the metal lid, wherein the protrusion extends into the recess. 17.The semiconductor device of claim 14, wherein the metal frame includes aplurality of second flaps, and wherein each of the plurality of secondflaps is folded to create sidewalls extending around a perimeter of themetal frame.
 18. The semiconductor device of claim 14, wherein the edgeof the opening is oriented toward a center of the frame.
 19. Thesemiconductor device of claim 14, further including a secondsemiconductor die disposed over the substrate, wherein the flap isdisposed between the first semiconductor die and second semiconductordie.
 20. A semiconductor device, comprising: a substrate; asemiconductor die disposed over the substrate; a frame disposed over thesubstrate around the semiconductor die; and a lid disposed over theframe.
 21. The semiconductor device of claim 20, further including anotch in a sidewall of the frame.
 22. The semiconductor device of claim20, further including an opening formed through the frame, wherein aportion of the frame remains between the opening and the sidewall as aroof.
 23. The semiconductor device of claim 20, further including: anopening formed in the frame; and an indentation formed in the lid,wherein the indentation extends into the opening.
 24. The semiconductordevice of claim 20, wherein the frame includes a plurality ofcompartments.
 25. The semiconductor device of claim 20, furtherincluding a solder material connecting the frame to the substrate.